ion sputtering pump

基本解釋

A composite pump was developed which is composed of a non evaporable getter pump and a sputtering ion pump.
研制了一種由非蒸散型消氣劑泵與冷陰極濺射離子泵組成的復(fù)合泵。
The electronic circuitry of the various vacuum protection schemes, which use sputtering ion pump or cold-cathode or hot cathode ionization gauge as sensors, was compared.
分析比較了濺射離子泵、冷陰極電離超高真空計(jì)、熱陰極電離超高真空計(jì)等作為真空保護(hù)傳感器的不同電子學(xué)設(shè)計(jì)。